Myfab

Realize your nano vision

Epitaxy

   
Epitaxy
 
Epitaxy is the art of growing perfect crystals at a crystalline substrate, with nanometer precision in thicknesses and accurate composition control.

We have the capacity to grow

  • Si/SiGe on Si substrates
  • InGaAsP(N) on InP and GaAs substrates
  • AlGaAs on GaAs substrates
  • SiC on Si and SiC substrates
 
Click on heading to sort the table.
 NameManufacturerModel
DetailsEpsilon2000ASM200Si-epi
DetailsAsterixAixtron AIX 200/4Movpe
DetailsMozartVeeco TurboDiscGaAs-MOVPE D180 LDM
DetailsObelixAixtronLP-VPE 2106
DetailsSemlanEpigress VP508/SK SiC-VPE
DetailsNapoleonAixtronVP508GFR SiC epi