Myfab

Realize your nano vision
Johan Andersson

     Johan Andersson

 

Processing competence: Has worked with numerous silicon related projects, mostly MEMS applications including deep ASE plasma etching, surface profiling, bonding, contact lithography, oxidation/diffusion, LPCVD/PECVD deposition, metallization and wet chemistry etching (TMAH and KOH silicon etching), both for internal research groups as well as commercial companies.

Main tool responsibilities include DWL laser lithography, Centrotherm LPCVD furnaces and surface profiling.

 

Tel: +46 31 772 50 55

Mobile: +46 73 034 6292

List of tools where Johan Andersson is tool responsible

 NameTypeTool Id
DetailsSurface profiler - Tencor P15Surface profilometer108
DetailsWafer Inspection System - IR 127
DetailsSteam production 90100
DetailsSteam boiler #1 90101
DetailsProcess gases 90200
DetailsDi water 90300
DetailsArgon (Ar) 90201
DetailsSilane 5% (SiH4) 90202
DetailsFluorine 5% (F) 90203
DetailsFan exhaust systems, floor 9 91000
DetailsDiborane 5% (B2H6)) 90204
DetailsMethane 5% (CH4) 90205
DetailsAcetylene (C2H2) 90206
DetailsOctafluorocyclobutane (C4F8) 90207
DetailsTetrafluoromethane (CF4) 90208
DetailsMethane (CH4) 90209
DetailsTrifluoromethane (CHF3) 90210
DetailsChlorine (CL2) 90211
DetailsCarbon dioxide (CO2) 90212
DetailsHydrogen (H2) 90213
DetailsHydrogen bromide (Hbr) 90214
DetailsHelium (He) 90215
DetailsKrypton (Kr) 90216
DetailsNitrous oxide (N2O) 90217
DetailsNeon (Ne) 90218
DetailsNitrogen trifluoride (NF3) 90219
DetailsAmmonia (NH3) 90220
DetailsOxygen (O2) 90221
DetailsSulfur hexafluoride (SF6) 90222
DetailsSilicon tetrachloride (SiCl4) 90223
DetailsDichlorosilane (SiH2Cl2) 90224
DetailsSilane LPCVD (SiH4) 90225
DetailsSilane Oxford (SiH4) 90226
DetailsProcess cooling, loop 7 90606
DetailsDi water, loop 1 90301
DetailsDi water, loop 2 90302
DetailsDi water, loop 3 90303
DetailsDi water, loop 4 90304
DetailsHydrogen 5% (H2) 90227
DetailsProcess cooling water 90600
DetailsSteam boiler #2 90102
DetailsSolvent exhaust FF01, floor 9 91001
DetailsAcid/base exhaust FF02, floor 9 91002
DetailsPoisonous exhaust FF03-04, floor 9 91003