Education & training are important functions provided by the Nanofabrication Laboratory. In its simplest form, hands-on training on the use of process tools is given by the staff. Classroom instruction is also given first in the form of The Cleanroom Introduction Course, which is a pre-requisite for all those who wish to access to Laboratory as a user. This covers such areas as safety, handling chemicals, proper cleanroom behaviour, and specific information concerning the Nanofabrication Laboratory. The course is offered on a monthly basis, and at additional times if the demand is sufficient.
A graduate course in micro and nano processing technologies is also offered by the Laboratory. This gives a theoretical introduction to the common processes used in a cleanroom environment.
With its considerable competence and experience in education, courses can be customized to suit any partner’s needs or interests.
Contact:
Associate Professor
Ulf Södervall
Phone: +46 (0)31 772 3431
Email: ulf.sodervall@chalmers.se
Cleanroom Introduction Course
You need the "Introduction course" to be able to enter the cleanroom and to get access to the booking system. You also need a "driving licence" to be able to book a particular tool.
Contact Ulf Södervall above for upcoming course dates.
The course dates are tentative. Note that a course may be postponed if there are too few participants, always make a booking beforehand on-line via the membership application found at:
http://labbokning.mc2.chalmers.se
where you should include information such as
- Name
- Birth date
- Research group/"kostnadställe"/"projectnumber"
- Dept/Section or Company
- Group leader/laboratory supervisor
- Dept/Section or Company
- Group leader/laboratory supervisor
- Phone number(stationary/Mobile)
- your position (Ph D student, Masters student, Post Doc etc)
- type of work to be done( research project, masters thesis work, etc)
- how long time will your activities last
- your access card number to Ulf Södervall.
A cleanroom manual will be handed out during the course.
get the manual as a pdf
If you have any questions:
- course fees, contact Ulf Södervall
- the booking system, contact Peter Modh.
- driving licences or equipment, contact Tool Responsible
Micro-And Nanoprocessing Technologies
Courseinfo_MNT2011.pdf 84.23 kb
Lectures are set up as below, more details and the actual time schedule will be seen via the presentation above.
The lectures will be added up with 3 problem solving sessions; where appropriate problems for the different processing techniques will be scrutinized in more detail.
| Lecture |
Topic |
Lecturer |
Handouts |
| 1 |
Introduction/Substrates/Diffusion |
Ulf Södervall |
File |
| 2 |
Thermal Oxidation, RTP and Implantation |
Ulf Södervall |
File |
| 3a |
TCAD |
Hans Hjelmgren |
File |
| 3b |
TCAD |
Hans Hjelmgren |
File |
| 4a |
Optical lithography - exposure modes-resist technology etc |
Piotr Jedrasik |
File |
| 4b |
Optical lithography - exposure modes-resist technology etc |
Piotr Jedrasik |
File |
| 5a |
Non-optical lithography - pattern design etc |
Piotr Jedrasik |
File |
| 5b |
Non-optical lithography - pattern design etc |
Piotr Jedrasik |
File |
| 6 |
Vacuum and plasma science |
Mats Hagberg |
File |
| 7 |
Evaporation and sputtering |
Mats Hagberg |
File |
| 8 |
PLD-Pulsed laser deposition |
Andrei Vorobiev |
File |
| 9 |
Epitaxial layer growth - MBE vs. CVD. |
Mahdad Sadeghi |
|
| 10 |
Surface processing (wafer cleaning, plasma etching, RIE, ICP, Lift off etc) |
Göran Alestig |
File |
| 11 |
Micromaching -MEMS, Microfluidics etc |
Cristina Rusu, IMEGO |
File 1 File 2 |
| 12 |
Interconnect, metallisation, contact formation, device technologies |
Göran Alestig |
File |
| 13 |
SPM/AFM/SEM nanocharacterisation and manipulation |
Piotr Jedrasik |
|
The course is also presented on MC2s central website.