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Analysis laboratory

Lab interior

General information

The MSL analysis laboratory is one of Europes most well equipped facilities for materials analysis. We offer a wide range of equipment for surface imaging, atomic structure and composition analysis.
Fast access to reliable microscopes is important for both materials research and process control. The analysis laboratory is located in the same cleanroom as the process laboratory. All of our sensitive equipment is placed upon a stable foundation, which is required for high resolution and high magnification. The laboratory is also equipped with a five-wire electrical power system to minimize magnetic stray fields around the instruments. As an internal or external customer you can either choose to have your own personnel in the lab, or you can hire the MSL engineers to carry out your analyses.

Scanning Electron Microscopy


With a SEM it is possible to study material surfaces of all kinds at extreme close-ups and to do element analysis by Energy Dispersive Spectroscopy (EDS). MSL has three SEM which are some of the best electron microscopes on the market. LEO 1550 FEG, is a high resolution SEM equipped with an INCA Energy EDS and an EBSP (Electron Backscatter Patterns) system, installed 1999. LEO 440 with LaB6 filament and an EDAX EDS equipment is a workhorse for general applications, installed 1999. Philips XL30 ESEM FEG, is an environmental scanning electron microscope to study non-conducting and biological samples, installed 1999. Hot and cold stages are also available for different experiments. The microscope is also used for electron beam lithography with a computer controlled electrostatic beam blanker.

Focused Ion Beam Equipment

Cleanroom interior

The latest contribution to the analysis laboratory is an FEI Strata DB235, dual beam FIB/SEM, installed 2003. This instrument has many applications and great possibilities for both analysis and modification of materials. The FIB is an SEM, used for imaging, combined with an ion beam for removing or depositing materials. Applications are for instance TEM sample preparation and pattern writing in materials. Another major advantage is that the sample you study can be grinded in-situ in order to create cross sections to analyse at greater depths.

Transmission Electron Microscopy

Cleanroom interior

With a TEM it is possible to reveal the internal microstructure of a sample down to atomic level and in combination with analysis techniques determine the elemental composition. FEI Tecnai F30 ST, installed 1999, is a state-of-the-art 300 kV FEG TEM/STEM instrument equipped with a Gatan Imaging Filter, EDS detector, HAADF detector, Lorentz lens and Bi-prism for Electron Holography. JEOL 2000FXII, installed 1989, is an analytical 200 kV TEM/STEM instrument equipped with EDS.

Surface Analysis and Characterization

Cleanroom interior

Elemental composition and chemical binding information from chemical shifts can be determined by X-ray Photoelectron Spectroscopy (XPS), or Electron Spectroscopy for Chemical Analysis (ESCA) as it is also called. Only the outermost 10-50 Å of the original surface are analysed in one spectrum. For analytical information at greater depths, depths profiling with Ar-ions is used. Physical Electronics Quantum 2000, installed 2002, is a PC controlled ESCA instrument with a spacial resolution of 10 um and an Ar-ion gun for depth profiling. Other techniques used for surface characterization are light microscopy and surface profilometry. WYKO NT2000, white light interferometer for surface profiling. Digital Instruments Nanoscope III, AFM. Olympus AX70 light microscope with a Nomarski prism and a CCD camera.

Sample preparation laboratories

Equipment to facilitate the preparation of samples for SEM and TEM are located in two rooms close to the microscopes. A complete line of tools for "mechanical" TEM sample preparation from bulk to thin foil including cutting, grinding, polishing, ultrasonic drills, dimple grinders and ion-milling are available.