Projects

	Silicon Technology

	Microsystem Technology

	Compound Semiconductor Technology

	Nano Fabrication Technology

Microsystem Technology

– Mechanics on a very small scale

Our resources within microsystems or micro electro mechanical systems are at your disposal. Through innovative design and pioneering process development the groups at Electrum Laboratory master the microsystem technology. It represent a link between conventional microelectronics and the fields of medical and bio technology, providing advanced sensors, analysis solutions and probes. Additional applications are found in the fields of opto technology for data- and telecommunications and radio frequency technology used in mobile and wireless systems.

	Array of microspikes Micromachined electrodes for EEG and other biopotential measurements contains an array of sharp, micro-scaled spikes designed to pierce the outer skin layer of living subjects. Hence, skin preparation and electrolytic gel is not needed. This results in significantly shorter and simpler application and cleansing procedures as well as shorter stabilization times than standard electrodes.  KTH in collaboration with Datex-Ohmeda, Instrumentarium Corp
	Micro measurement probe Very sharp measurement probe with multiple recording sites for testing of neuron activity in a guinea-pig’s brain tissue (Acreo).
	SideOpened microneedles Devices that circumvent the outermost skin layer for e.g. delivery of highly potent macromolecular drugs or vaccines, information extraction from impedance spectra of skin for disease diagnosis, and sampling of interstitial fluids from the skin for further analysis e.g. glucose detection. Our approach is based on hollow, side-opened microneedle arrays, a dosing and actuation system based on microspheres and selectively addressable spike arrays. (KTH)
	Microfluidics Miniaturization of fluidic systems allows the reduction of the amount of chemicals, increases sensitivity and speed of analysis, offers portability of the instrumentation or equipment and potentially reduces production costs through batch fabrication or high volume replication techniques. We engineer the flow channel geometry and tailor the microchannel surface properties. Valves, mixers, liquid metering structures, etc, are designed, tested and evaluated using simple and cost effective fabrication methods. (KTH)
	Flow-through filter  A microfluidic flow-through device for biochemical reactions on beads, which enables rapid bioluminescent real-time detection of single nucleotide polymorphism (SNP) has successfully been performed in our microfluidic flow-through device. We are now developing a microfluidic flow-through system for miniaturized DNA pyrosequencing. (KTH
	Infrared bolometer detector Uncooled focal plane bolometer IR detector array using high temperature anealed poly crystaline silicon as the temperature sensing material. The devices are fabricated in a new process where the detectors and the CMOS wafer with electronic circuits are first produced on separate wafers in specialized facilities/processes. Then the two wafers are aligned and bonded together with a low temperature polymer bonding technique. (KTH)
	Torsional Micromirrors Micromirror arrays are light modulators that can modulate the phase or amplitude of incident light. Application areas are, e.g., projection display systems, optical scanners, printers, aberration correction, adaptive optical systems, and devices in optical communication systems. Some of these applications require large two-dimensional arrays of individually addressable micromirrors. To achieve this, it is necessary to combine the micromirrors with on-chip electronics. (KTH)