Ulf Södervall

Responsible for the training and education for new users of the nanofabrication facilityand coordinating a PhD course in advanced micro and nanofabrication processing. Processspecialist with main focus on Chemical Mechanical Planarisation/Polishing and general wet processing applications, wafer cleaning, etching etc. Has a long experience from materials and surface characterisation mainly from SIMS.

Tel: +46 31 772 34 31

Mobile: +46 70 321 81 78

List of tools where Ulf Södervall is tool responsible